A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material

Xiaomei Shi, Ching Hsiang Cheng, Chen Chao, Like Wang, Yongping Zheng

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

6 Citations (Scopus)

Abstract

We present a novel normal and shear force sensor by using liquid metal alloy (Ga-In-Sn) as piezoresistive gauge material encapsulated in a polydimethylsiloxane (PDMS) substrate. By using liquid metal alloy as gauge material, it can detect large forces without breaking the sensor wires. Since the liquid-metal piezoresistors deform with the elastomeric substrate, shear and normal forces can be detected with resistance changes of the piezoresistors. Each force sensor comprises a pair of symmetric piezoresistors, which is screen-printed on the cavity of PDMS substrate with tilt angle around 30° to be sensitive to both normal and shear forces. Normal force will compress both piezoresistors as common mode while shear force will shorten one piezoresistor but elongate the other as differential mode. The testing results demonstrate the sensitivity of the force sensor in both normal and shear directions. The hysteresis of the force sensor was also measured.
Original languageEnglish
Title of host publication2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Pages483-486
Number of pages4
DOIs
Publication statusPublished - 1 Jun 2012
Event7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
Duration: 5 Mar 20128 Mar 2012

Conference

Conference7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
CountryJapan
CityKyoto
Period5/03/128/03/12

Keywords

  • liquid metal
  • normal and shear force sensor
  • PDMS

ASJC Scopus subject areas

  • Engineering (miscellaneous)

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