A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material

Xiaomei Shi; Ching Hsiang Cheng; Chen Chao; Like Wang; Yongping Zheng

doi:10.1109/NEMS.2012.6196822

A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material

Xiaomei Shi, Ching Hsiang Cheng, Chen Chao, Like Wang, Yongping Zheng

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

8 Citations (Scopus)

Abstract

We present a novel normal and shear force sensor by using liquid metal alloy (Ga-In-Sn) as piezoresistive gauge material encapsulated in a polydimethylsiloxane (PDMS) substrate. By using liquid metal alloy as gauge material, it can detect large forces without breaking the sensor wires. Since the liquid-metal piezoresistors deform with the elastomeric substrate, shear and normal forces can be detected with resistance changes of the piezoresistors. Each force sensor comprises a pair of symmetric piezoresistors, which is screen-printed on the cavity of PDMS substrate with tilt angle around 30° to be sensitive to both normal and shear forces. Normal force will compress both piezoresistors as common mode while shear force will shorten one piezoresistor but elongate the other as differential mode. The testing results demonstrate the sensitivity of the force sensor in both normal and shear directions. The hysteresis of the force sensor was also measured.

Original language	English
Title of host publication	2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Pages	483-486
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2012.6196822
Publication status	Published - 1 Jun 2012
Event	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan Duration: 5 Mar 2012 → 8 Mar 2012

Conference

Conference	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Country/Territory	Japan
City	Kyoto
Period	5/03/12 → 8/03/12

Keywords

liquid metal
normal and shear force sensor
PDMS

ASJC Scopus subject areas

Engineering (miscellaneous)

More information

10.1109/NEMS.2012.6196822

Cite this

@inproceedings{b7d694594f8d4b7bb3b067f44288aa2a,

title = "A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material",

abstract = "We present a novel normal and shear force sensor by using liquid metal alloy (Ga-In-Sn) as piezoresistive gauge material encapsulated in a polydimethylsiloxane (PDMS) substrate. By using liquid metal alloy as gauge material, it can detect large forces without breaking the sensor wires. Since the liquid-metal piezoresistors deform with the elastomeric substrate, shear and normal forces can be detected with resistance changes of the piezoresistors. Each force sensor comprises a pair of symmetric piezoresistors, which is screen-printed on the cavity of PDMS substrate with tilt angle around 30° to be sensitive to both normal and shear forces. Normal force will compress both piezoresistors as common mode while shear force will shorten one piezoresistor but elongate the other as differential mode. The testing results demonstrate the sensitivity of the force sensor in both normal and shear directions. The hysteresis of the force sensor was also measured.",

keywords = "liquid metal, normal and shear force sensor, PDMS",

author = "Xiaomei Shi and Cheng, {Ching Hsiang} and Chen Chao and Like Wang and Yongping Zheng",

year = "2012",

month = jun,

day = "1",

doi = "10.1109/NEMS.2012.6196822",

language = "English",

isbn = "9781467311243",

pages = "483--486",

booktitle = "2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012",

note = "7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 ; Conference date: 05-03-2012 Through 08-03-2012",

}

Shi, X, Cheng, CH, Chao, C, Wang, L & Zheng, Y 2012, A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material. in 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012., 6196822, pp. 483-486, 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, 5/03/12. https://doi.org/10.1109/NEMS.2012.6196822

A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material. / Shi, Xiaomei; Cheng, Ching Hsiang; Chao, Chen et al.
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 483-486 6196822.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material

AU - Shi, Xiaomei

AU - Cheng, Ching Hsiang

AU - Chao, Chen

AU - Wang, Like

AU - Zheng, Yongping

PY - 2012/6/1

Y1 - 2012/6/1

N2 - We present a novel normal and shear force sensor by using liquid metal alloy (Ga-In-Sn) as piezoresistive gauge material encapsulated in a polydimethylsiloxane (PDMS) substrate. By using liquid metal alloy as gauge material, it can detect large forces without breaking the sensor wires. Since the liquid-metal piezoresistors deform with the elastomeric substrate, shear and normal forces can be detected with resistance changes of the piezoresistors. Each force sensor comprises a pair of symmetric piezoresistors, which is screen-printed on the cavity of PDMS substrate with tilt angle around 30° to be sensitive to both normal and shear forces. Normal force will compress both piezoresistors as common mode while shear force will shorten one piezoresistor but elongate the other as differential mode. The testing results demonstrate the sensitivity of the force sensor in both normal and shear directions. The hysteresis of the force sensor was also measured.

AB - We present a novel normal and shear force sensor by using liquid metal alloy (Ga-In-Sn) as piezoresistive gauge material encapsulated in a polydimethylsiloxane (PDMS) substrate. By using liquid metal alloy as gauge material, it can detect large forces without breaking the sensor wires. Since the liquid-metal piezoresistors deform with the elastomeric substrate, shear and normal forces can be detected with resistance changes of the piezoresistors. Each force sensor comprises a pair of symmetric piezoresistors, which is screen-printed on the cavity of PDMS substrate with tilt angle around 30° to be sensitive to both normal and shear forces. Normal force will compress both piezoresistors as common mode while shear force will shorten one piezoresistor but elongate the other as differential mode. The testing results demonstrate the sensitivity of the force sensor in both normal and shear directions. The hysteresis of the force sensor was also measured.

KW - liquid metal

KW - normal and shear force sensor

KW - PDMS

UR - http://www.scopus.com/inward/record.url?scp=84861536058&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2012.6196822

DO - 10.1109/NEMS.2012.6196822

M3 - Conference article published in proceeding or book

SN - 9781467311243

SP - 483

EP - 486

BT - 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

T2 - 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Y2 - 5 March 2012 through 8 March 2012

ER -

A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material

Abstract

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Keywords

ASJC Scopus subject areas

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