A performance tradeoff function for evaluating suggested parameters in the reactive ion etching process

  • H. C.W. Lau
  • , C. X.H. Tang
  • , B. P.K. Leung
  • , Ka Man Lee
  • , G. T.S. Ho

Research output: Journal article publication › Journal article › Academic research › peer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'A performance tradeoff function for evaluating suggested parameters in the reactive ion etching process'. Together they form a unique fingerprint.

Engineering

Keyphrases

Material Science