@inproceedings{7af15ad204984c9498f1be24380e6374,
title = "A novel transducer for photon energy detection via near-field cavity optomechanics",
abstract = "This paper reports an optomechanical transducer for photon energy detection on the silicon-photonics platform. The photon energy is enhanced by a ring resonator and converted into mechanical energy via optical gradient force. An integrated electron tunneling displacement sensor is used to detect the photon-induced mechanical deformation on-chip. Compared with the traditional photon energy detection based on photon absorption, this optomechanical transducer has more compact size (60 μm × 230 μm), low thermal noise (0.03 V/°C) and low cost. And it is a silicon based device, compatible with CMOS process and easier to be integrated with silicon-photonics.",
keywords = "electron tunneling displacement sensor, NEMS, Optomechanics, photon energy detection, resonator cavity",
author = "Tao, \{J. F.\} and H. Cai and Zhang, \{Q. X.\} and Tsai, \{J. M.\} and P. Kropelnicki and Randles, \{A. B.\} and M. Tang and Liu, \{A. Q.\}",
year = "2013",
doi = "10.1109/Transducers.2013.6627068",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "1511--1514",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}