A novel rapid electropulsing treatment on AZO thin ceramic films

Dagang Miao; Hongmei Zhao; Aishu Li; Songmin Shang

doi:10.1016/j.ceramint.2015.02.119

A novel rapid electropulsing treatment on AZO thin ceramic films

Dagang Miao, Hongmei Zhao, Aishu Li, Songmin Shang

The Hong Kong Polytechnic University

Research output: Journal article publication › Journal article › Academic research › peer-review

3 Citations (Scopus)

Abstract

AZO thin films were deposited on quartz glass and were treated with electropulsing. Effect of the electropulsing on AZO films was investigated by X-ray diffraction (XRD), scanning electron microscopy(SEM), Atomic Force Microscopy (AFM), Hall Effect measurement and UV-visible transmittance spectra. The results showed that AZO films treated with 8 min electropulsing treatment (EPT) presented better crystallization, higher visible transmittance with blue-shift, smooth surface and the lowest electrical resistivity of 8.8×10^-4 Ω cm. However, further EPT would degenerate the film properties. After 8 min electropulsing, the electrical conductivity of the AZO thin films increased by about 81%. These results indicate that the fast and low-energy consumed EPT may be a promising substitution for traditional heat annealing.

Original language	English
Pages (from-to)	8235-8240
Number of pages	6
Journal	Ceramics International
Volume	41
Issue number	6
DOIs	https://doi.org/10.1016/j.ceramint.2015.02.119
Publication status	Published - 1 Jan 2015

Keywords

AZO thin ceramic film
Electrical conductivity
Electropulsing

ASJC Scopus subject areas

Ceramics and Composites
Process Chemistry and Technology
Electronic, Optical and Magnetic Materials
Surfaces, Coatings and Films
Materials Chemistry

More information

10.1016/j.ceramint.2015.02.119

Cite this

@article{d1c7e89038f6430984fc1fc533371975,

title = "A novel rapid electropulsing treatment on AZO thin ceramic films",

abstract = "AZO thin films were deposited on quartz glass and were treated with electropulsing. Effect of the electropulsing on AZO films was investigated by X-ray diffraction (XRD), scanning electron microscopy(SEM), Atomic Force Microscopy (AFM), Hall Effect measurement and UV-visible transmittance spectra. The results showed that AZO films treated with 8 min electropulsing treatment (EPT) presented better crystallization, higher visible transmittance with blue-shift, smooth surface and the lowest electrical resistivity of 8.8×10-4 Ω cm. However, further EPT would degenerate the film properties. After 8 min electropulsing, the electrical conductivity of the AZO thin films increased by about 81%. These results indicate that the fast and low-energy consumed EPT may be a promising substitution for traditional heat annealing.",

keywords = "AZO thin ceramic film, Electrical conductivity, Electropulsing",

author = "Dagang Miao and Hongmei Zhao and Aishu Li and Songmin Shang",

year = "2015",

month = jan,

day = "1",

doi = "10.1016/j.ceramint.2015.02.119",

language = "English",

volume = "41",

pages = "8235--8240",

journal = "Ceramics International",

issn = "0272-8842",

publisher = "Elsevier Ltd",

number = "6",

}

TY - JOUR

T1 - A novel rapid electropulsing treatment on AZO thin ceramic films

AU - Miao, Dagang

AU - Zhao, Hongmei

AU - Li, Aishu

AU - Shang, Songmin

PY - 2015/1/1

Y1 - 2015/1/1

N2 - AZO thin films were deposited on quartz glass and were treated with electropulsing. Effect of the electropulsing on AZO films was investigated by X-ray diffraction (XRD), scanning electron microscopy(SEM), Atomic Force Microscopy (AFM), Hall Effect measurement and UV-visible transmittance spectra. The results showed that AZO films treated with 8 min electropulsing treatment (EPT) presented better crystallization, higher visible transmittance with blue-shift, smooth surface and the lowest electrical resistivity of 8.8×10-4 Ω cm. However, further EPT would degenerate the film properties. After 8 min electropulsing, the electrical conductivity of the AZO thin films increased by about 81%. These results indicate that the fast and low-energy consumed EPT may be a promising substitution for traditional heat annealing.

AB - AZO thin films were deposited on quartz glass and were treated with electropulsing. Effect of the electropulsing on AZO films was investigated by X-ray diffraction (XRD), scanning electron microscopy(SEM), Atomic Force Microscopy (AFM), Hall Effect measurement and UV-visible transmittance spectra. The results showed that AZO films treated with 8 min electropulsing treatment (EPT) presented better crystallization, higher visible transmittance with blue-shift, smooth surface and the lowest electrical resistivity of 8.8×10-4 Ω cm. However, further EPT would degenerate the film properties. After 8 min electropulsing, the electrical conductivity of the AZO thin films increased by about 81%. These results indicate that the fast and low-energy consumed EPT may be a promising substitution for traditional heat annealing.

KW - AZO thin ceramic film

KW - Electrical conductivity

KW - Electropulsing

UR - http://www.scopus.com/inward/record.url?scp=84930416128&partnerID=8YFLogxK

U2 - 10.1016/j.ceramint.2015.02.119

DO - 10.1016/j.ceramint.2015.02.119

M3 - Journal article

SN - 0272-8842

VL - 41

SP - 8235

EP - 8240

JO - Ceramics International

JF - Ceramics International

IS - 6

ER -

A novel rapid electropulsing treatment on AZO thin ceramic films

Abstract

Keywords

ASJC Scopus subject areas

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