A novel rapid electropulsing treatment on AZO thin ceramic films

Dagang Miao, Hongmei Zhao, Aishu Li, Songmin Shang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

2 Citations (Scopus)

Abstract

AZO thin films were deposited on quartz glass and were treated with electropulsing. Effect of the electropulsing on AZO films was investigated by X-ray diffraction (XRD), scanning electron microscopy(SEM), Atomic Force Microscopy (AFM), Hall Effect measurement and UV-visible transmittance spectra. The results showed that AZO films treated with 8 min electropulsing treatment (EPT) presented better crystallization, higher visible transmittance with blue-shift, smooth surface and the lowest electrical resistivity of 8.8×10-4 Ω cm. However, further EPT would degenerate the film properties. After 8 min electropulsing, the electrical conductivity of the AZO thin films increased by about 81%. These results indicate that the fast and low-energy consumed EPT may be a promising substitution for traditional heat annealing.
Original languageEnglish
Pages (from-to)8235-8240
Number of pages6
JournalCeramics International
Volume41
Issue number6
DOIs
Publication statusPublished - 1 Jan 2015

Keywords

  • AZO thin ceramic film
  • Electrical conductivity
  • Electropulsing

ASJC Scopus subject areas

  • Ceramics and Composites
  • Process Chemistry and Technology
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Materials Chemistry

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