TY - GEN
T1 - A novel photonic dew-point hygrometer with ultra-high accuracy
AU - Tao, Jifang
AU - Wang, Li
AU - Cai, Hong
AU - Sun, Tao
AU - Song, Junfeng
AU - Gu, Yuandong
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/2/26
Y1 - 2016/2/26
N2 - Dew-point is the temperature at which vapor begins to condense out of the gaseous phase. The deterministic relationship between dew-point temperature and relative humidity brought about the industry widely-accepted «chilled-mirror» dew-point hygrometers for highly accurate humidity measurement, essential for a broad range of industrial and metrology applications, despite several limitations such as high cost, large size and slow response. In this report, we demonstrate a compact, integrated photonic dew-point hygrometer that features ultra-high accuracy (potential +/- 0.02), small footprint (∼ mm2), and fast response (< 1 minute), which paves the way for high accuracy on-chip dew-point detection; promises broader adoption in applications which conventional technology is unsuitable due to size, cost, and other constraints.
AB - Dew-point is the temperature at which vapor begins to condense out of the gaseous phase. The deterministic relationship between dew-point temperature and relative humidity brought about the industry widely-accepted «chilled-mirror» dew-point hygrometers for highly accurate humidity measurement, essential for a broad range of industrial and metrology applications, despite several limitations such as high cost, large size and slow response. In this report, we demonstrate a compact, integrated photonic dew-point hygrometer that features ultra-high accuracy (potential +/- 0.02), small footprint (∼ mm2), and fast response (< 1 minute), which paves the way for high accuracy on-chip dew-point detection; promises broader adoption in applications which conventional technology is unsuitable due to size, cost, and other constraints.
UR - http://www.scopus.com/inward/record.url?scp=84970968826&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2016.7421774
DO - 10.1109/MEMSYS.2016.7421774
M3 - Conference article published in proceeding or book
AN - SCOPUS:84970968826
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 893
EP - 896
BT - MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Y2 - 24 January 2016 through 28 January 2016
ER -