A novel photonic dew-point hygrometer with ultra-high accuracy

Jifang Tao, Li Wang, Hong Cai, Tao Sun, Junfeng Song, Yuandong Gu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

2 Citations (Scopus)

Abstract

Dew-point is the temperature at which vapor begins to condense out of the gaseous phase. The deterministic relationship between dew-point temperature and relative humidity brought about the industry widely-accepted «chilled-mirror» dew-point hygrometers for highly accurate humidity measurement, essential for a broad range of industrial and metrology applications, despite several limitations such as high cost, large size and slow response. In this report, we demonstrate a compact, integrated photonic dew-point hygrometer that features ultra-high accuracy (potential +/- 0.02), small footprint (∼ mm2), and fast response (< 1 minute), which paves the way for high accuracy on-chip dew-point detection; promises broader adoption in applications which conventional technology is unsuitable due to size, cost, and other constraints.

Original languageEnglish
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages893-896
Number of pages4
ISBN (Electronic)9781509019731
DOIs
Publication statusPublished - 26 Feb 2016
Externally publishedYes
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 24 Jan 201628 Jan 2016

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Conference

Conference29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/TerritoryChina
CityShanghai
Period24/01/1628/01/16

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'A novel photonic dew-point hygrometer with ultra-high accuracy'. Together they form a unique fingerprint.

Cite this