A Novel Local Bottom-gate Carbon Nanotube Field Effect Transistor on SOI

Min Zhang; Philip Ching Ho Chan; Qi Liang; Zikang Tang

A Novel Local Bottom-gate Carbon Nanotube Field Effect Transistor on SOI

Min Zhang, Philip Ching Ho Chan, Qi Liang, Zikang Tang

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

2 Citations (Scopus)

Abstract

A study was presented on the fabrication and effects of a novel local bottom-gate carbon nanotube field effect transistor (CNFET) using SOI substrate. E-beam lithography and transmission electron microscopy (TEM) were used for the study. The results showed that the fabrication process is simple and individual device operation, lower operation voltage and better gate capacitive coupling can be achieved.

Original language	English
Title of host publication	IEEE International SOI Conference
Pages	63-64
Number of pages	2
Publication status	Published - 6 Nov 2003
Externally published	Yes
Event	2003 IEEE International SOI Conference Proceedings - Newport Beach, CA, United States Duration: 29 Sept 2003 → 2 Oct 2003

Conference

Conference	2003 IEEE International SOI Conference Proceedings
Country/Territory	United States
City	Newport Beach, CA
Period	29/09/03 → 2/10/03

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

@inproceedings{7f3f50fe070e4b749c8b6db2be59f5aa,

title = "A Novel Local Bottom-gate Carbon Nanotube Field Effect Transistor on SOI",

abstract = "A study was presented on the fabrication and effects of a novel local bottom-gate carbon nanotube field effect transistor (CNFET) using SOI substrate. E-beam lithography and transmission electron microscopy (TEM) were used for the study. The results showed that the fabrication process is simple and individual device operation, lower operation voltage and better gate capacitive coupling can be achieved.",

author = "Min Zhang and Chan, {Philip Ching Ho} and Qi Liang and Zikang Tang",

year = "2003",

month = nov,

day = "6",

language = "English",

pages = "63--64",

booktitle = "IEEE International SOI Conference",

note = "2003 IEEE International SOI Conference Proceedings ; Conference date: 29-09-2003 Through 02-10-2003",

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T1 - A Novel Local Bottom-gate Carbon Nanotube Field Effect Transistor on SOI

AU - Zhang, Min

AU - Chan, Philip Ching Ho

AU - Liang, Qi

AU - Tang, Zikang

PY - 2003/11/6

Y1 - 2003/11/6

N2 - A study was presented on the fabrication and effects of a novel local bottom-gate carbon nanotube field effect transistor (CNFET) using SOI substrate. E-beam lithography and transmission electron microscopy (TEM) were used for the study. The results showed that the fabrication process is simple and individual device operation, lower operation voltage and better gate capacitive coupling can be achieved.

AB - A study was presented on the fabrication and effects of a novel local bottom-gate carbon nanotube field effect transistor (CNFET) using SOI substrate. E-beam lithography and transmission electron microscopy (TEM) were used for the study. The results showed that the fabrication process is simple and individual device operation, lower operation voltage and better gate capacitive coupling can be achieved.

UR - http://www.scopus.com/inward/record.url?scp=0142217046&partnerID=8YFLogxK

M3 - Conference article published in proceeding or book

SP - 63

EP - 64

BT - IEEE International SOI Conference

T2 - 2003 IEEE International SOI Conference Proceedings

Y2 - 29 September 2003 through 2 October 2003

ER -

A Novel Local Bottom-gate Carbon Nanotube Field Effect Transistor on SOI

Abstract

Conference

ASJC Scopus subject areas

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