A Novel Local Bottom-gate Carbon Nanotube Field Effect Transistor on SOI

Min Zhang, Philip Ching Ho Chan, Qi Liang, Zikang Tang

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

2 Citations (Scopus)

Abstract

A study was presented on the fabrication and effects of a novel local bottom-gate carbon nanotube field effect transistor (CNFET) using SOI substrate. E-beam lithography and transmission electron microscopy (TEM) were used for the study. The results showed that the fabrication process is simple and individual device operation, lower operation voltage and better gate capacitive coupling can be achieved.
Original languageEnglish
Title of host publicationIEEE International SOI Conference
Pages63-64
Number of pages2
Publication statusPublished - 6 Nov 2003
Externally publishedYes
Event2003 IEEE International SOI Conference Proceedings - Newport Beach, CA, United States
Duration: 29 Sep 20032 Oct 2003

Conference

Conference2003 IEEE International SOI Conference Proceedings
CountryUnited States
CityNewport Beach, CA
Period29/09/032/10/03

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this