A novel integrated micromachined tunable laser using polysilicon 3-D mirror

A. Q. Liu; Xuming Zhang; V. M. Murukeshan; Y. L. Lam

doi:10.1109/68.920739

A novel integrated micromachined tunable laser using polysilicon 3-D mirror

A. Q. Liu, Xuming Zhang, V. M. Murukeshan, Y. L. Lam

Research output: Journal article publication › Journal article › Academic research › peer-review

47 Citations (Scopus)

Abstract

A prototype tunable laser of ∼2 mm × 1.5 mm size has been developed for wavelength-division-multiplexing (WDM) application. This device is an integrated micromachined polysilicon three-dimensional (3-D) mirror with a single-mode Fabry-Perot laser diode and an antireflection-coated optical fiber. The micromirror can be driven to move laterally by an electrostatic comb-drive that changes the external cavity length of laser diode enabling wavelength tuning. A wavelength-tunable range of 16 nm is obtained using a driving voltage within ±3 V at a bias voltage of 10 V.

Original language	English
Pages (from-to)	427-429
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	13
Issue number	5
DOIs	https://doi.org/10.1109/68.920739
Publication status	Published - 1 May 2001
Externally published	Yes

Keywords

External cavity laser diode
Optical MEMS
Tunable laser
WDM

ASJC Scopus subject areas

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics
Physics and Astronomy (miscellaneous)

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10.1109/68.920739

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title = "A novel integrated micromachined tunable laser using polysilicon 3-D mirror",

abstract = "A prototype tunable laser of ∼2 mm × 1.5 mm size has been developed for wavelength-division-multiplexing (WDM) application. This device is an integrated micromachined polysilicon three-dimensional (3-D) mirror with a single-mode Fabry-Perot laser diode and an antireflection-coated optical fiber. The micromirror can be driven to move laterally by an electrostatic comb-drive that changes the external cavity length of laser diode enabling wavelength tuning. A wavelength-tunable range of 16 nm is obtained using a driving voltage within ±3 V at a bias voltage of 10 V.",

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AB - A prototype tunable laser of ∼2 mm × 1.5 mm size has been developed for wavelength-division-multiplexing (WDM) application. This device is an integrated micromachined polysilicon three-dimensional (3-D) mirror with a single-mode Fabry-Perot laser diode and an antireflection-coated optical fiber. The micromirror can be driven to move laterally by an electrostatic comb-drive that changes the external cavity length of laser diode enabling wavelength tuning. A wavelength-tunable range of 16 nm is obtained using a driving voltage within ±3 V at a bias voltage of 10 V.

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KW - Optical MEMS

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JF - IEEE Photonics Technology Letters

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A novel integrated micromachined tunable laser using polysilicon 3-D mirror

Abstract

Keywords

ASJC Scopus subject areas

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