A prototype tunable laser of ∼2 mm × 1.5 mm size has been developed for wavelength-division-multiplexing (WDM) application. This device is an integrated micromachined polysilicon three-dimensional (3-D) mirror with a single-mode Fabry-Perot laser diode and an antireflection-coated optical fiber. The micromirror can be driven to move laterally by an electrostatic comb-drive that changes the external cavity length of laser diode enabling wavelength tuning. A wavelength-tunable range of 16 nm is obtained using a driving voltage within ±3 V at a bias voltage of 10 V.
- External cavity laser diode
- Optical MEMS
- Tunable laser
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Atomic and Molecular Physics, and Optics
- Physics and Astronomy (miscellaneous)