A novel integrated micromachined tunable laser using polysilicon 3-D mirror

A. Q. Liu, Xuming Zhang, V. M. Murukeshan, Y. L. Lam

Research output: Journal article publicationJournal articleAcademic researchpeer-review

46 Citations (Scopus)


A prototype tunable laser of ∼2 mm × 1.5 mm size has been developed for wavelength-division-multiplexing (WDM) application. This device is an integrated micromachined polysilicon three-dimensional (3-D) mirror with a single-mode Fabry-Perot laser diode and an antireflection-coated optical fiber. The micromirror can be driven to move laterally by an electrostatic comb-drive that changes the external cavity length of laser diode enabling wavelength tuning. A wavelength-tunable range of 16 nm is obtained using a driving voltage within ±3 V at a bias voltage of 10 V.
Original languageEnglish
Pages (from-to)427-429
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number5
Publication statusPublished - 1 May 2001
Externally publishedYes


  • External cavity laser diode
  • Optical MEMS
  • Tunable laser
  • WDM

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Physics and Astronomy (miscellaneous)


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