A novel direct drive electromagnetic XY nanopositioning stage

Zhiwei Zhu, Li Chen, Suet To (Corresponding Author)

Research output: Journal article publicationJournal articleAcademic researchpeer-review

1 Citation (Scopus)

Abstract

To overcome the inherent limitation of existing nanopositioning stages running in hundreds of micrometres, a novel normal-stressed electromagnetic actuator is developed to construct a direct drive XY nanopositioning stage, which features a contactless dual-axial actuation with a relatively high force density, a loosely-constrained stroke, and a monolithic magnetic circuit. Assisted by the established model, the mechanical-electromagnetic parameters for the stage are determined with a further verification through both finite element analyses and experimental tests. By combining a PID-based and a parallel resonant controller, the control system for the stage is constructed, which is then demonstrated by ultra-precisely tracking a Lissajous trajectory.

Original languageEnglish
Pages (from-to)415-418
Number of pages4
JournalCIRP Annals
Volume70
Issue number1
DOIs
Publication statusPublished - 6 Jun 2021

Keywords

  • Mechatronic
  • Servo system
  • Ultra precision

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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