Abstract
A new trial of bi-directional moving linear ultrasonic motor (LUSM) using a new structure has been studied. This linear ultrasonic motor is composed of a single plate which was chiseled two grooves in both terminal parts to form two weak links. By adjusting dimensions of weak links and terminal plates, finite element modeling analysis revealed that two standing wave modes, i.e., one in sine vibration mode and the other one in cosine vibration mode, with nearly the same wavelength can be formed in the middle part of the plate. With eight pieces of PZT4 piezoceramics mounted to the middle plate to excite the local vibration, a new type of bi-directional linear moving ultrasonic motor of 60 mm in length and 10 mm in width has been designed, fabricated and characterized. The following performances have been achieved: maximum velocity 220 mm/s, maximum output force 1.764 N in one direction and maximum velocity 270 mm/s, maximum output force 1.96 N in another direction, and resolution better than 0.2 μm. Soc. for Elec. Eng.
| Original language | English |
|---|---|
| Pages (from-to) | 49-55 |
| Number of pages | 7 |
| Journal | Zhongguo Dianji Gongcheng Xuebao/Proceedings of the Chinese Society of Electrical Engineering |
| Volume | 29 |
| Issue number | 24 |
| Publication status | Published - 25 Aug 2009 |
Keywords
- Bi-directional moving
- Linear ultrasonic motor
- Piezoceramic
- Standing-wave type
ASJC Scopus subject areas
- Electrical and Electronic Engineering