A new method for measuring the residual stresses in multi-layered thin film systems

Keyphrases

• Multilayer Thin Films 100%
• Residual Stress 100%
• Thin Systems 100%
• High Temperature 20%
• Thermal Properties 20%
• Analytical Model 20%
• High Stress 20%
• X-ray Diffraction Method 20%
• Multiple Layers 20%
• X-ray Diffraction Pattern 20%
• Amorphous Layer 20%
• Single Point 20%
• Material Layer 20%
• Crystal Layer 20%
• Mechanical Failure 20%
• Epitaxial Layers 20%
• Scanning X-ray Diffraction 20%

Material Science

• Residual Stress 100%
• Thin Films 100%
• X-Ray Diffraction 60%
• Diffraction Measurement 20%
• Diffraction Pattern 20%
• Mechanical Failure 20%
• Film 20%
• Thermal Property 20%

Engineering

• Residual Stress 100%
• Thin Films 100%
• Ray Diffraction 20%
• Material Layer 20%
• X-Ray Diffraction Pattern 20%
• Ray Diffraction Technique 20%
• Mechanical Failure 20%
• Analytical Model 20%
• Polycrystalline 20%