A new flexure-based Yθ nanomanipulator with nanometer-scale resolution and millimeter-scale workspace

Hui Tang, Yangmin Li

Research output: Journal article publicationJournal articleAcademic researchpeer-review

42 Citations (Scopus)

Abstract

In this paper, the development of a flexure-based two-degree-of-freedom (2-DOF) nanomanipulator with modified differential lever displacement amplifier is conducted, which aims to break through the millimeter-range barrier. The kinetostatics modeling of the mechanism is established by using the pseudorigid body method, also the analytical modeling of lever is built up, as well as the dimension optimizations and the mechanism performance validations are conducted by using the Particle Swarm Optimization algorithm and the finite-element analysis method, respectively. With the consideration of hysteresis effect inherent in piezoelectric ceramics actuators, the hysteresis modeling is conducted by using the Preisach theory. To enhance the mechanism positioning performance, a novel feedforward nonlinear proportion-integration-differentiation control strategy composed by the nonlinear PID controller and the inverted Preisach hysteresis compensator is proposed in this paper. Finally, a series of closed-loop motion tracking experiments have been carried out. It indicates that the developed mechanism has achieved a millimeter workspace (3.1273 mm × 26.5°), nanometer scale motion resolution (40 nm), as well as a closed-loop positioning bandwidth of over 10 Hz.
Original languageEnglish
Article number6882801
Pages (from-to)1320-1330
Number of pages11
JournalIEEE/ASME Transactions on Mechatronics
Volume20
Issue number3
DOIs
Publication statusPublished - 1 Jun 2015
Externally publishedYes

Keywords

  • Feedforward nonlinear PID (FNPID)
  • Hysteresis compensator
  • Lever displacement amplifier
  • Nanomanipulator
  • Pseudorigid body

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this