A NEMS optical switch driven by optical force

J. F. Tao; H. Cai; A. B. Yu; Q. X. Zhang; J. Wu; K. Xu; J. T. Lin; G. Q. Lo; D. L. Kwong; A. Q. Liu

doi:10.1109/TRANSDUCERS.2011.5969798

A NEMS optical switch driven by optical force

J. F. Tao
, H. Cai
, A. B. Yu
, Q. X. Zhang
, J. Wu
, K. Xu
, J. T. Lin
, G. Q. Lo
, D. L. Kwong
, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

2 Citations (Scopus)

Abstract

In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator. It has a switching contrast of 16 dB and a response time of 0.2 μs, which is 10³ times faster than the traditional millimeter-scaled optical switches. It has potential applications in the high speed optical-packet-switching communications and the silicon-photonic integrated circuits.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1753-1756
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969798
Publication status	Published - Jun 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

Keywords

NEMS
optical force
optical switch
ring resonator

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

More information

10.1109/TRANSDUCERS.2011.5969798

Cite this

Tao, J. F., Cai, H., Yu, A. B., Zhang, Q. X., Wu, J., Xu, K., Lin, J. T., Lo, G. Q., Kwong, D. L., & Liu, A. Q. (2011). A NEMS optical switch driven by optical force. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1753-1756). Article 5969798 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969798

@inproceedings{4a42f6222bca406ebbfec6afa0cdc139,

title = "A NEMS optical switch driven by optical force",

abstract = "In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator. It has a switching contrast of 16 dB and a response time of 0.2 μs, which is 103 times faster than the traditional millimeter-scaled optical switches. It has potential applications in the high speed optical-packet-switching communications and the silicon-photonic integrated circuits.",

keywords = "NEMS, optical force, optical switch, ring resonator",

author = "Tao, \{J. F.\} and H. Cai and Yu, \{A. B.\} and Zhang, \{Q. X.\} and J. Wu and K. Xu and Lin, \{J. T.\} and Lo, \{G. Q.\} and Kwong, \{D. L.\} and Liu, \{A. Q.\}",

year = "2011",

month = jun,

doi = "10.1109/TRANSDUCERS.2011.5969798",

language = "English",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "1753--1756",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Tao, JF, Cai, H, Yu, AB, Zhang, QX, Wu, J, Xu, K, Lin, JT, Lo, GQ, Kwong, DL & Liu, AQ 2011, A NEMS optical switch driven by optical force. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969798, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1753-1756, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969798

A NEMS optical switch driven by optical force. / Tao, J. F.; Cai, H.; Yu, A. B. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1753-1756 5969798 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

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AU - Cai, H.

AU - Yu, A. B.

AU - Zhang, Q. X.

AU - Wu, J.

AU - Xu, K.

AU - Lin, J. T.

AU - Lo, G. Q.

AU - Kwong, D. L.

AU - Liu, A. Q.

PY - 2011/6

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N2 - In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator. It has a switching contrast of 16 dB and a response time of 0.2 μs, which is 103 times faster than the traditional millimeter-scaled optical switches. It has potential applications in the high speed optical-packet-switching communications and the silicon-photonic integrated circuits.

AB - In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator. It has a switching contrast of 16 dB and a response time of 0.2 μs, which is 103 times faster than the traditional millimeter-scaled optical switches. It has potential applications in the high speed optical-packet-switching communications and the silicon-photonic integrated circuits.

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KW - optical force

KW - optical switch

KW - ring resonator

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M3 - Conference article published in proceeding or book

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T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Y2 - 5 June 2011 through 9 June 2011

ER -

A NEMS optical switch driven by optical force

Abstract

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Conference

Keywords

ASJC Scopus subject areas

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