A NEMS optical switch driven by optical force

J. F. Tao, H. Cai, A. B. Yu, Q. X. Zhang, J. Wu, K. Xu, J. T. Lin, G. Q. Lo, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

2 Citations (Scopus)

Abstract

In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator. It has a switching contrast of 16 dB and a response time of 0.2 μs, which is 103 times faster than the traditional millimeter-scaled optical switches. It has potential applications in the high speed optical-packet-switching communications and the silicon-photonic integrated circuits.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1753-1756
Number of pages4
DOIs
Publication statusPublished - Jun 2011
Externally publishedYes
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/TerritoryChina
CityBeijing
Period5/06/119/06/11

Keywords

  • NEMS
  • optical force
  • optical switch
  • ring resonator

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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