A NEMS optical switch driven by optical force

J. F. Tao; H. Cai; A. B. Yu; Q. X. Zhang; J. Wu; K. Xu; J. T. Lin; G. Q. Lo; D. L. Kwong; A. Q. Liu

doi:10.1109/TRANSDUCERS.2011.5969798

A NEMS optical switch driven by optical force

J. F. Tao, H. Cai, A. B. Yu, Q. X. Zhang, J. Wu, K. Xu, J. T. Lin, G. Q. Lo, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

2 Citations (Scopus)

Abstract

In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator. It has a switching contrast of 16 dB and a response time of 0.2 μs, which is 10³ times faster than the traditional millimeter-scaled optical switches. It has potential applications in the high speed optical-packet-switching communications and the silicon-photonic integrated circuits.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1753-1756
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969798
Publication status	Published - Jun 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

Keywords

NEMS
optical force
optical switch
ring resonator

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

More information

10.1109/TRANSDUCERS.2011.5969798

Cite this

Tao, J. F., Cai, H., Yu, A. B., Zhang, Q. X., Wu, J., Xu, K., Lin, J. T., Lo, G. Q., Kwong, D. L., & Liu, A. Q. (2011). A NEMS optical switch driven by optical force. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1753-1756). Article 5969798 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969798

@inproceedings{4a42f6222bca406ebbfec6afa0cdc139,

title = "A NEMS optical switch driven by optical force",

abstract = "In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator. It has a switching contrast of 16 dB and a response time of 0.2 μs, which is 103 times faster than the traditional millimeter-scaled optical switches. It has potential applications in the high speed optical-packet-switching communications and the silicon-photonic integrated circuits.",

keywords = "NEMS, optical force, optical switch, ring resonator",

author = "Tao, \{J. F.\} and H. Cai and Yu, \{A. B.\} and Zhang, \{Q. X.\} and J. Wu and K. Xu and Lin, \{J. T.\} and Lo, \{G. Q.\} and Kwong, \{D. L.\} and Liu, \{A. Q.\}",

year = "2011",

month = jun,

doi = "10.1109/TRANSDUCERS.2011.5969798",

language = "English",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "1753--1756",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Tao, JF, Cai, H, Yu, AB, Zhang, QX, Wu, J, Xu, K, Lin, JT, Lo, GQ, Kwong, DL & Liu, AQ 2011, A NEMS optical switch driven by optical force. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969798, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1753-1756, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969798

A NEMS optical switch driven by optical force. / Tao, J. F.; Cai, H.; Yu, A. B. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1753-1756 5969798 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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T1 - A NEMS optical switch driven by optical force

AU - Tao, J. F.

AU - Cai, H.

AU - Yu, A. B.

AU - Zhang, Q. X.

AU - Wu, J.

AU - Xu, K.

AU - Lin, J. T.

AU - Lo, G. Q.

AU - Kwong, D. L.

AU - Liu, A. Q.

PY - 2011/6

Y1 - 2011/6

N2 - In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator. It has a switching contrast of 16 dB and a response time of 0.2 μs, which is 103 times faster than the traditional millimeter-scaled optical switches. It has potential applications in the high speed optical-packet-switching communications and the silicon-photonic integrated circuits.

AB - In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator. It has a switching contrast of 16 dB and a response time of 0.2 μs, which is 103 times faster than the traditional millimeter-scaled optical switches. It has potential applications in the high speed optical-packet-switching communications and the silicon-photonic integrated circuits.

KW - NEMS

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KW - ring resonator

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T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Y2 - 5 June 2011 through 9 June 2011

ER -

A NEMS optical switch driven by optical force

Abstract

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Conference

Keywords

ASJC Scopus subject areas

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