@inproceedings{35f5342d80274529924dd41d75e72b07,
title = "A nanomachined tunable oscillator controlled by electrostatic and optical force",
abstract = "We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10\%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tension. Particularly, the high-Q optical cavity greatly enhances the system sensitivity, making it extremely sensitive to the motional signal, which is often overwhelmed by background noise.",
author = "Huang, \{J. G.\} and B. Dsong and H. Cai and Gu, \{Y. D.\} and Wu, \{J. H.\} and Chen, \{T. N.\} and Yang, \{Z. C.\} and Jin, \{Y. F.\} and Hao, \{Y. L.\} and Kwong, \{D. L.\} and Liu, \{A. Q.\}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",
year = "2015",
month = feb,
day = "26",
doi = "10.1109/MEMSYS.2015.7050882",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "February",
pages = "45--48",
booktitle = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015",
edition = "February",
}