A nanomachined torque sensor with ultrahigh sensitivity

Jian Guo Huang; Hong Cat; Yuan Dong Gu; Bin Dong; Jun Feng Song; Zhen Chuan Yang; Yu Feng Jin; Yu Long Hao; Jiu Hui Wu; Tian Ning Chen; Dim Lee Kwong; Ai Qun Liu

doi:10.1109/MEMSYS.2016.7421765

A nanomachined torque sensor with ultrahigh sensitivity

Jian Guo Huang, Hong Cat, Yuan Dong Gu, Bin Dong, Jun Feng Song, Zhen Chuan Yang, Yu Feng Jin, Yu Long Hao, Jiu Hui Wu, Tian Ning Chen, Dim Lee Kwong, Ai Qun Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

This paper reports, for the first time, a novel nanoscale torque sensor in a split ring resonator. The mechanical resonator is embedded into ring resonator and separated by 200 nm from the substrate. By taking advantage of extreme sensitivity of ring resonator, the torque sensor achieves a displacement noise floor of 80 fm/ Hz05. This is corresponding to small torque as small as 0.17×10-18 Nm. Particularly, the platform can be used to investigate the dispersive and dissipative coupling in optomechanics for novel physical devices and opens new door for a wide range of physical measurements involving extremely small torques.

Original language	English
Title of host publication	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	858-861
Number of pages	4
ISBN (Electronic)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421765
Publication status	Published - 26 Feb 2016
Externally published	Yes
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2016-February
ISSN (Print)	1084-6999

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/Territory	China
City	Shanghai
Period	24/01/16 → 28/01/16

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

More information

10.1109/MEMSYS.2016.7421765

Cite this

Huang, J. G., Cat, H., Gu, Y. D., Dong, B., Song, J. F., Yang, Z. C., Jin, Y. F., Hao, Y. L., Wu, J. H., Chen, T. N., Kwong, D. L., & Liu, A. Q. (2016). A nanomachined torque sensor with ultrahigh sensitivity. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 858-861). Article 7421765 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421765

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title = "A nanomachined torque sensor with ultrahigh sensitivity",

abstract = "This paper reports, for the first time, a novel nanoscale torque sensor in a split ring resonator. The mechanical resonator is embedded into ring resonator and separated by 200 nm from the substrate. By taking advantage of extreme sensitivity of ring resonator, the torque sensor achieves a displacement noise floor of 80 fm/ Hz05. This is corresponding to small torque as small as 0.17×10-18 Nm. Particularly, the platform can be used to investigate the dispersive and dissipative coupling in optomechanics for novel physical devices and opens new door for a wide range of physical measurements involving extremely small torques.",

author = "Huang, {Jian Guo} and Hong Cat and Gu, {Yuan Dong} and Bin Dong and Song, {Jun Feng} and Yang, {Zhen Chuan} and Jin, {Yu Feng} and Hao, {Yu Long} and Wu, {Jiu Hui} and Chen, {Tian Ning} and Kwong, {Dim Lee} and Liu, {Ai Qun}",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 ; Conference date: 24-01-2016 Through 28-01-2016",

year = "2016",

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day = "26",

doi = "10.1109/MEMSYS.2016.7421765",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "858--861",

booktitle = "MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems",

}

Huang, JG, Cat, H, Gu, YD, Dong, B, Song, JF, Yang, ZC, Jin, YF, Hao, YL, Wu, JH, Chen, TN, Kwong, DL & Liu, AQ 2016, A nanomachined torque sensor with ultrahigh sensitivity. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421765, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, Institute of Electrical and Electronics Engineers Inc., pp. 858-861, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421765

A nanomachined torque sensor with ultrahigh sensitivity. / Huang, Jian Guo; Cat, Hong; Gu, Yuan Dong et al.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. p. 858-861 7421765 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AB - This paper reports, for the first time, a novel nanoscale torque sensor in a split ring resonator. The mechanical resonator is embedded into ring resonator and separated by 200 nm from the substrate. By taking advantage of extreme sensitivity of ring resonator, the torque sensor achieves a displacement noise floor of 80 fm/ Hz05. This is corresponding to small torque as small as 0.17×10-18 Nm. Particularly, the platform can be used to investigate the dispersive and dissipative coupling in optomechanics for novel physical devices and opens new door for a wide range of physical measurements involving extremely small torques.

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Huang JG, Cat H, Gu YD, Dong B, Song JF, Yang ZC et al. A nanomachined torque sensor with ultrahigh sensitivity. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. p. 858-861. 7421765. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421765

A nanomachined torque sensor with ultrahigh sensitivity

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