A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

B. Dong; H. Cai; G. I. Ng; P. Kropelnicki; J. M. Tsai; A. B. Randles; M. Tang; Y. D. Gu; Z. G. Suo; A. Q. Liu

doi:10.1063/1.4827096

A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

B. Dong
, H. Cai
, G. I. Ng
, P. Kropelnicki
, J. M. Tsai
, A. B. Randles
, M. Tang
, Y. D. Gu
, Z. G. Suo
, A. Q. Liu

Research output: Journal article publication › Journal article › Academic research › peer-review

34 Citations (Scopus)

Abstract

In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation arc. The actuation displacement can reach up to 14 nm with a measured resolution of 0.8 nm, when the Q-factor of the ring resonator is tuned from 15 × 10³ to 6 × 10³. The potential applications of the NEMS actuator include single molecule manipulation, nano-manipulation, and high sensitivity sensors.

Original language	English
Article number	181105
Journal	Applied Physics Letters
Volume	103
Issue number	18
DOIs	https://doi.org/10.1063/1.4827096
Publication status	Published - 28 Oct 2013
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.4827096

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title = "A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator",

abstract = "In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation arc. The actuation displacement can reach up to 14 nm with a measured resolution of 0.8 nm, when the Q-factor of the ring resonator is tuned from 15 × 103 to 6 × 103. The potential applications of the NEMS actuator include single molecule manipulation, nano-manipulation, and high sensitivity sensors.",

author = "B. Dong and H. Cai and Ng, \{G. I.\} and P. Kropelnicki and Tsai, \{J. M.\} and Randles, \{A. B.\} and M. Tang and Gu, \{Y. D.\} and Suo, \{Z. G.\} and Liu, \{A. Q.\}",

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doi = "10.1063/1.4827096",

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T1 - A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

AU - Dong, B.

AU - Cai, H.

AU - Ng, G. I.

AU - Kropelnicki, P.

AU - Tsai, J. M.

AU - Randles, A. B.

AU - Tang, M.

AU - Gu, Y. D.

AU - Suo, Z. G.

AU - Liu, A. Q.

PY - 2013/10/28

Y1 - 2013/10/28

N2 - In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation arc. The actuation displacement can reach up to 14 nm with a measured resolution of 0.8 nm, when the Q-factor of the ring resonator is tuned from 15 × 103 to 6 × 103. The potential applications of the NEMS actuator include single molecule manipulation, nano-manipulation, and high sensitivity sensors.

AB - In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation arc. The actuation displacement can reach up to 14 nm with a measured resolution of 0.8 nm, when the Q-factor of the ring resonator is tuned from 15 × 103 to 6 × 103. The potential applications of the NEMS actuator include single molecule manipulation, nano-manipulation, and high sensitivity sensors.

UR - https://www.scopus.com/pages/publications/84889641860

U2 - 10.1063/1.4827096

DO - 10.1063/1.4827096

M3 - Journal article

AN - SCOPUS:84889641860

SN - 0003-6951

VL - 103

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

M1 - 181105

ER -

A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

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