A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

B. Dong; H. Cai; G. I. Ng; P. Kropelnicki; J. M. Tsai; A. B. Randles; M. Tang; Y. D. Gu; Z. G. Suo; A. Q. Liu

doi:10.1063/1.4827096

A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

B. Dong, H. Cai, G. I. Ng, P. Kropelnicki, J. M. Tsai, A. B. Randles, M. Tang, Y. D. Gu, Z. G. Suo, A. Q. Liu

Research output: Journal article publication › Journal article › Academic research › peer-review

33 Citations (Scopus)

Abstract

In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation arc. The actuation displacement can reach up to 14 nm with a measured resolution of 0.8 nm, when the Q-factor of the ring resonator is tuned from 15 × 10³ to 6 × 10³. The potential applications of the NEMS actuator include single molecule manipulation, nano-manipulation, and high sensitivity sensors.

Original language	English
Article number	181105
Journal	Applied Physics Letters
Volume	103
Issue number	18
DOIs	https://doi.org/10.1063/1.4827096
Publication status	Published - 28 Oct 2013
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.4827096

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title = "A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator",

abstract = "In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation arc. The actuation displacement can reach up to 14 nm with a measured resolution of 0.8 nm, when the Q-factor of the ring resonator is tuned from 15 × 103 to 6 × 103. The potential applications of the NEMS actuator include single molecule manipulation, nano-manipulation, and high sensitivity sensors.",

author = "B. Dong and H. Cai and Ng, {G. I.} and P. Kropelnicki and Tsai, {J. M.} and Randles, {A. B.} and M. Tang and Gu, {Y. D.} and Suo, {Z. G.} and Liu, {A. Q.}",

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T1 - A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

AU - Dong, B.

AU - Cai, H.

AU - Ng, G. I.

AU - Kropelnicki, P.

AU - Tsai, J. M.

AU - Randles, A. B.

AU - Tang, M.

AU - Gu, Y. D.

AU - Suo, Z. G.

AU - Liu, A. Q.

PY - 2013/10/28

Y1 - 2013/10/28

N2 - In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation arc. The actuation displacement can reach up to 14 nm with a measured resolution of 0.8 nm, when the Q-factor of the ring resonator is tuned from 15 × 103 to 6 × 103. The potential applications of the NEMS actuator include single molecule manipulation, nano-manipulation, and high sensitivity sensors.

AB - In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation arc. The actuation displacement can reach up to 14 nm with a measured resolution of 0.8 nm, when the Q-factor of the ring resonator is tuned from 15 × 103 to 6 × 103. The potential applications of the NEMS actuator include single molecule manipulation, nano-manipulation, and high sensitivity sensors.

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DO - 10.1063/1.4827096

M3 - Journal article

AN - SCOPUS:84889641860

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VL - 103

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

M1 - 181105

ER -

A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

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