A nano-actuator via cavity-enhanced optical dipole force

J. F. Tao; J. Wu; H. Cai; Q. X. Zhang; X. Kun; J. M. Tsai; D. L. Kwong; A. Q. Liu

doi:10.1109/MEMSYS.2012.6170360

A nano-actuator via cavity-enhanced optical dipole force

J. F. Tao, J. Wu, H. Cai, Q. X. Zhang, X. Kun, J. M. Tsai, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

3 Citations (Scopus)

Abstract

In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obtains a tuning range up to 52 nm. The optical power consumption is reduced to 0.04 mW/nm, which is much smaller than typical value of 3mW/nm in optomechanical systems.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1125-1128
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170360
Publication status	Published - Jan 2012
Externally published	Yes
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 29 Jan 2012 → 2 Feb 2012

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	29/01/12 → 2/02/12

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2012.6170360

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Tao, J. F., Wu, J., Cai, H., Zhang, Q. X., Kun, X., Tsai, J. M., Kwong, D. L., & Liu, A. Q. (2012). A nano-actuator via cavity-enhanced optical dipole force. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1125-1128). Article 6170360 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170360

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title = "A nano-actuator via cavity-enhanced optical dipole force",

abstract = "In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obtains a tuning range up to 52 nm. The optical power consumption is reduced to 0.04 mW/nm, which is much smaller than typical value of 3mW/nm in optomechanical systems.",

author = "Tao, {J. F.} and J. Wu and H. Cai and Zhang, {Q. X.} and X. Kun and Tsai, {J. M.} and Kwong, {D. L.} and Liu, {A. Q.}",

year = "2012",

month = jan,

doi = "10.1109/MEMSYS.2012.6170360",

language = "English",

isbn = "9781467303248",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "1125--1128",

booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",

note = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",

}

Tao, JF, Wu, J, Cai, H, Zhang, QX, Kun, X, Tsai, JM, Kwong, DL & Liu, AQ 2012, A nano-actuator via cavity-enhanced optical dipole force. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170360, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1125-1128, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29/01/12. https://doi.org/10.1109/MEMSYS.2012.6170360

A nano-actuator via cavity-enhanced optical dipole force. / Tao, J. F.; Wu, J.; Cai, H. et al.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1125-1128 6170360 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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A nano-actuator via cavity-enhanced optical dipole force

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