A model reference adaptive PID control for electromagnetic actuated micro-positioning stage

Shunli Xiao, Yangmin Li, Jinguo Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

29 Citations (Scopus)

Abstract

This paper presents a model reference adaptive PID controller for controlling a novel compliant flexures-based XY micro-positioning stage driven by electromagnetic actuators. The stage is specially designed by employing double four-bar parallelogram flexures and four non-contact electromagnetic force actuators to realize the kinematic decoupling and force decoupling respectively. Based on preliminary open loop experiments and simple PID controller based close-loop experiments, we found that the system is with typical hysteresis and nonlinear characteristics. As model reference adaptive control techniques possess great advantages to tackle robustness issues of nonlinear and model uncertainty systems, it is designed and adopted to control the micro-manipulator system. At first, a model reference adaptive PID controller design process is introduced. Then control parameters are systematically tuned based on intuitive desired performance and robustness. At last, experimental results verify the process for controlling the micro-positioning stage, which shows that the adopted controller can drive the mobile stage to track the desired reference path exactly.
Original languageEnglish
Title of host publication2012 IEEE International Conference on Automation Science and Engineering
Subtitle of host publicationGreen Automation Toward a Sustainable Society, CASE 2012
Pages97-102
Number of pages6
DOIs
Publication statusPublished - 1 Dec 2012
Externally publishedYes
Event2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012 - Seoul, Korea, Republic of
Duration: 20 Aug 201224 Aug 2012

Conference

Conference2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012
Country/TerritoryKorea, Republic of
CitySeoul
Period20/08/1224/08/12

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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