A micromachined thermo-optic tunable laser

H. Cai, B. Liu, Xuming Zhang, W. M. Zhu, J. Tamil, W. Zhang, Q. X. Zhang, A. Q. Liu

Research output: Journal article publicationConference articleAcademic researchpeer-review

2 Citations (Scopus)


The paper presents a thermo-optic tunable laser that makes use of a micromachined etalon to form the external cavity. The wavelength tuning is obtained by the thermo-optic effect of the silicon material. In experiment, a wavelength tuning range of 14 nm is demonstrated by applying a heating current of 18.7 mA to a deep-etched silicon etalon of 206 μm wide. In the dynamic test, this laser measures a tuning speed of 3.2 μs, which is much faster than the typical speed of 1 ms as given by the previous MEMS tunable lasers that rely on the motion of mirrors or gratings. Since this laser is based on a different tuning mechanism of thermo-optic effect and requires no mechanical movement, it possesses many advantages such as fast speed, simple configuration and planar structure, and will broaden the applications of MEMS tunable lasers.
Original languageEnglish
Article number4805561
Pages (from-to)1027-1030
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 1 Jun 2009
Externally publishedYes
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 25 Jan 200929 Jan 2009

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials


Dive into the research topics of 'A micromachined thermo-optic tunable laser'. Together they form a unique fingerprint.

Cite this