A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators

Yuan Hsing Fu, Ai Qun Liu, Wei Ming Zhu, Xuming Zhang, Din Ping Tsai, Jing Bo Zhang, Ting Mei, Ji Fang Tao, Hong Chen Guo, Xin Hai Zhang, Jing Hua Teng, Nikolay I. Zheludev, Guo Qiang Lo, Dim Lee Kwong

Research output: Journal article publicationJournal articleAcademic researchpeer-review

187 Citations (Scopus)


A micromachined reconfigurable metamaterial is presented, whose unit cell consists of a pair of asymmetric split-ring resonators (ASRRs); one is fixed to the substrate while the other is patterned on a movable frame. The reconfigurable metamaterial and the supporting structures (e.g., microactuators, anchors, supporting frames, etc.) are fabricated on a silicon-on-insulator wafer using deep reactive-ion etching (DRIE). By adjusting the distance between the two ASRRs, the strength of dipole-dipole coupling can be tuned continuously using the micromachined actuators and this enables tailoring of the electromagnetic response. The reconfiguration of unit cells endows the micromachined reconfigurable metamaterials with unique merits such as electromagnetic response under normal incidence and wide tuning of resonant frequency (measured as 31% and 22% for transverse electric polarization and transverse magnetic polarization, respectively). The reconfiguration could also allow switching between the polarization-dependent and polarization-independent states. With these features, the micromachined reconfigurable metamaterials may find potential applications in transformation optics devices, sensors, intelligent detectors, tunable frequency-selective surfaces, and spectral filters. KGaA, Weinheim.
Original languageEnglish
Pages (from-to)3589-3594
Number of pages6
JournalAdvanced Functional Materials
Issue number18
Publication statusPublished - 23 Sept 2011


  • asymmetric split-ring resonators
  • magnetism
  • metamaterials
  • microelectromechanical systems

ASJC Scopus subject areas

  • Biomaterials
  • Electrochemistry
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials


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