A Micromachined Piezoresistive High-g Accelerometer with High Sensitivity and Wide Frequency-Band: Design and Modeling

Zuan Kai Wang; Deng Gang Zong; De Ren Lu; Bin Xiong; Yue Lin Wang; Minhang Bao

doi:10.1515/IJNSNS.2002.3.3-4.307

A Micromachined Piezoresistive High-g Accelerometer with High Sensitivity and Wide Frequency-Band: Design and Modeling

Zuan Kai Wang, Deng Gang Zong, De Ren Lu, Bin Xiong, Yue Lin Wang, Minhang Bao

Research output: Journal article publication › Journal article › Academic research › peer-review

1 Citation (Scopus)

Abstract

A high-g, micromachined piezoresistive accelerometer, which can increase the sensor's frequency-band while maintaining a high sensitivity is presented and modeled here. A simplified analytical model is established to describe the accelerometer's performance. Results of the analytical model shows good agreement with the finite element modeling. At last, the configuration of the accelerometer was optimized.

Original language	English
Pages (from-to)	307-310
Number of pages	4
Journal	International Journal of Nonlinear Sciences and Numerical Simulation
Volume	3
Issue number	3-4
DOIs	https://doi.org/10.1515/IJNSNS.2002.3.3-4.307
Publication status	Published - 2002
Externally published	Yes

Keywords

Accelerometer
MEMS
Piezoresistive sensor

ASJC Scopus subject areas

Statistical and Nonlinear Physics
Computational Mechanics
Modelling and Simulation
Engineering (miscellaneous)
Mechanics of Materials
General Physics and Astronomy
Applied Mathematics

More information

10.1515/IJNSNS.2002.3.3-4.307

Cite this

@article{27616a6e8b904fcda92a7a34354ebe15,

title = "A Micromachined Piezoresistive High-g Accelerometer with High Sensitivity and Wide Frequency-Band: Design and Modeling",

abstract = "A high-g, micromachined piezoresistive accelerometer, which can increase the sensor's frequency-band while maintaining a high sensitivity is presented and modeled here. A simplified analytical model is established to describe the accelerometer's performance. Results of the analytical model shows good agreement with the finite element modeling. At last, the configuration of the accelerometer was optimized.",

keywords = "Accelerometer, MEMS, Piezoresistive sensor",

author = "Wang, {Zuan Kai} and Zong, {Deng Gang} and Lu, {De Ren} and Bin Xiong and Wang, {Yue Lin} and Minhang Bao",

note = "Funding Information: The work is supported by 973 MOEMS, The Major State Basic Research Pragram of China(G 199903 3103 ,G199903 3101)",

year = "2002",

doi = "10.1515/IJNSNS.2002.3.3-4.307",

language = "English",

volume = "3",

pages = "307--310",

journal = "International Journal of Nonlinear Sciences and Numerical Simulation",

issn = "1565-1339",

publisher = "Walter de Gruyter GmbH",

number = "3-4",

}

A Micromachined Piezoresistive High-g Accelerometer with High Sensitivity and Wide Frequency-Band: Design and Modeling. / Wang, Zuan Kai; Zong, Deng Gang; Lu, De Ren et al.
In: International Journal of Nonlinear Sciences and Numerical Simulation, Vol. 3, No. 3-4, 2002, p. 307-310.

Research output: Journal article publication › Journal article › Academic research › peer-review

TY - JOUR

T1 - A Micromachined Piezoresistive High-g Accelerometer with High Sensitivity and Wide Frequency-Band: Design and Modeling

AU - Wang, Zuan Kai

AU - Zong, Deng Gang

AU - Lu, De Ren

AU - Xiong, Bin

AU - Wang, Yue Lin

AU - Bao, Minhang

N1 - Funding Information: The work is supported by 973 MOEMS, The Major State Basic Research Pragram of China(G 199903 3103 ,G199903 3101)

PY - 2002

Y1 - 2002

N2 - A high-g, micromachined piezoresistive accelerometer, which can increase the sensor's frequency-band while maintaining a high sensitivity is presented and modeled here. A simplified analytical model is established to describe the accelerometer's performance. Results of the analytical model shows good agreement with the finite element modeling. At last, the configuration of the accelerometer was optimized.

AB - A high-g, micromachined piezoresistive accelerometer, which can increase the sensor's frequency-band while maintaining a high sensitivity is presented and modeled here. A simplified analytical model is established to describe the accelerometer's performance. Results of the analytical model shows good agreement with the finite element modeling. At last, the configuration of the accelerometer was optimized.

KW - Accelerometer

KW - MEMS

KW - Piezoresistive sensor

UR - http://www.scopus.com/inward/record.url?scp=0036319931&partnerID=8YFLogxK

U2 - 10.1515/IJNSNS.2002.3.3-4.307

DO - 10.1515/IJNSNS.2002.3.3-4.307

M3 - Journal article

AN - SCOPUS:0036319931

SN - 1565-1339

VL - 3

SP - 307

EP - 310

JO - International Journal of Nonlinear Sciences and Numerical Simulation

JF - International Journal of Nonlinear Sciences and Numerical Simulation

IS - 3-4

ER -

A Micromachined Piezoresistive High-g Accelerometer with High Sensitivity and Wide Frequency-Band: Design and Modeling

Abstract

Keywords

ASJC Scopus subject areas

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