A micromachined optical delay line by switchable metamaterials

W. M. Zhu; J. F. Tao; J. H. Teng; X. H. Zhang; H. Tanoto; H. C. Guo; Q. Y. Wu; T. Bourouina; A. Q. Liu

doi:10.1109/TRANSDUCERS.2011.5969712

A micromachined optical delay line by switchable metamaterials

W. M. Zhu, J. F. Tao, J. H. Teng, X. H. Zhang, H. Tanoto, H. C. Guo, Q. Y. Wu, T. Bourouina, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

This paper presents a MEMS switchable optical delay line, which works at terahertz (THz) region. The geometry of the unit cell is tunable by MEMS actuators [1]. In the experiment, it measures that the round trip time of the 5-m silicon-metal cavity with the metamaterial slab is delayed by a factor of 100 when the gap of the metamaterial unit cell is shifted from 4 m to 8 m. Compared with the traditional tunable optical delay line [2], the metamaterial optical delay line has merits of fine tuning resolution, high tuning speed and feasible for high density integration.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	2670-2673
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969712
Publication status	Published - Jun 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

Keywords

Micro-electro-mechanical system (MEMS)
optical delay line
Switchable metamaterials

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

More information

10.1109/TRANSDUCERS.2011.5969712

Cite this

Zhu, W. M., Tao, J. F., Teng, J. H., Zhang, X. H., Tanoto, H., Guo, H. C., Wu, Q. Y., Bourouina, T., & Liu, A. Q. (2011). A micromachined optical delay line by switchable metamaterials. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2670-2673). Article 5969712 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969712

@inproceedings{e4e892042436465db45b9c5bc0c45f2f,

title = "A micromachined optical delay line by switchable metamaterials",

abstract = "This paper presents a MEMS switchable optical delay line, which works at terahertz (THz) region. The geometry of the unit cell is tunable by MEMS actuators [1]. In the experiment, it measures that the round trip time of the 5-m silicon-metal cavity with the metamaterial slab is delayed by a factor of 100 when the gap of the metamaterial unit cell is shifted from 4 m to 8 m. Compared with the traditional tunable optical delay line [2], the metamaterial optical delay line has merits of fine tuning resolution, high tuning speed and feasible for high density integration.",

keywords = "Micro-electro-mechanical system (MEMS), optical delay line, Switchable metamaterials",

author = "Zhu, {W. M.} and Tao, {J. F.} and Teng, {J. H.} and Zhang, {X. H.} and H. Tanoto and Guo, {H. C.} and Wu, {Q. Y.} and T. Bourouina and Liu, {A. Q.}",

year = "2011",

month = jun,

doi = "10.1109/TRANSDUCERS.2011.5969712",

language = "English",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "2670--2673",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Zhu, WM, Tao, JF, Teng, JH, Zhang, XH, Tanoto, H, Guo, HC, Wu, QY, Bourouina, T & Liu, AQ 2011, A micromachined optical delay line by switchable metamaterials. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969712, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 2670-2673, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969712

A micromachined optical delay line by switchable metamaterials. / Zhu, W. M.; Tao, J. F.; Teng, J. H. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2670-2673 5969712 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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Zhu WM, Tao JF, Teng JH, Zhang XH, Tanoto H, Guo HC et al. A micromachined optical delay line by switchable metamaterials. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2670-2673. 5969712. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969712

A micromachined optical delay line by switchable metamaterials

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