A micro optical filter using polysilicon surface micromachining process

A. Asundi, L. D. Zheng, N. C. Tien, Z. Chen, A. Q. Liu

Research output: Journal article publicationConference articleAcademic researchpeer-review

Abstract

Surface micromachining fabrication process offers a novel approach for realizing micro-optical system onto a chip. A new micromachined micro optical filter which relies on intensity changes due to the interaction between a light beam and the optical shutter has been designed, fabricated and tested. The micro optical filter consists of a 2 micron thick polysilicon shutter suspended from the substrate by springs which are 200 micron long polysilicon folded beams. The sacrificial layer which is sandwiched between the silicon substrate and the structure is removed with a hydrofluoric acid wet etch, and a selfassembled monolayer coating is used to prevent friction. The filter is designed as a mass-spring system that moves in response to acceleration force. An application of accelerometer with higher sensitivity in a lower acceleration range is expected.

Original languageEnglish
Pages (from-to)216-220
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3241
DOIs
Publication statusPublished - Nov 1997
Externally publishedYes
EventSmart Materials, Structures, and Integrated Systems - Adelaide, SA, Australia
Duration: 10 Dec 199710 Dec 1997

Keywords

  • MEMS
  • Micro optics
  • Micromachining
  • Optical filter

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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