TY - JOUR
T1 - A metal-electrode-free, fully integrated, soft triboelectric sensor array for self-powered tactile sensing
AU - Wang, Lingyun
AU - Liu, Yiming
AU - Liu, Qing
AU - Zhu, Yuyan
AU - Wang, Haoyu
AU - Xie, Zhaoqian
AU - Yu, Xinge
AU - Zi, Yunlong
N1 - Funding Information:
This work was funded by HKSAR The Research Grants Council Early Career Scheme (Grant no. 24206919), HKSAR Innovation and Technology Support Program Tier 3 (Grant no. ITS/085/18), the Chinese University of Hong Kong Direct Grant (Grant no. 4055086), Shun Hing Institute of Advanced Engineering (Grant no. RNE-p5-18), and City University of Hong Kong (Grant no. 9610423, 9667199).
Publisher Copyright:
© 2020, The Author(s).
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020/12/1
Y1 - 2020/12/1
N2 - The dramatic advances in flexible/wearable electronics have garnered great attention for touch sensors for practical applications in human health monitoring and human–machine interfaces. Self-powered triboelectric tactile sensors with high sensitivity, reduced crosstalk, and simple processing routes are highly desirable. Herein, we introduce a facile and low-cost fabrication approach for a metal-electrode free, fully integrated, flexible, and self-powered triboelectric tactile sensor array with 8-by-8 sensor units. Through the height difference between the sensor units and interconnect electrodes, the crosstalk derived from the electrodes has been successfully suppressed with no additional shielding layers. The tactile sensor array shows a remarkable sensitivity of 0.063 V kPa–1 with a linear range from 5 to 50 kPa, which covers a broad range of testing objects. Furthermore, due to the advanced mechanical design, the flexible sensor array exhibits great capability of pressure sensing even under a curved state. The voltage responses from the pattern mapping by finger touching demonstrate the uniformity of the sensor array. Finally, real-time tactile sensing associated with light-emitting diode (LED) array lighting demonstrates the potential application of the sensor array in position tracking, self-powered touch screens, human–machine interfaces and many others.
AB - The dramatic advances in flexible/wearable electronics have garnered great attention for touch sensors for practical applications in human health monitoring and human–machine interfaces. Self-powered triboelectric tactile sensors with high sensitivity, reduced crosstalk, and simple processing routes are highly desirable. Herein, we introduce a facile and low-cost fabrication approach for a metal-electrode free, fully integrated, flexible, and self-powered triboelectric tactile sensor array with 8-by-8 sensor units. Through the height difference between the sensor units and interconnect electrodes, the crosstalk derived from the electrodes has been successfully suppressed with no additional shielding layers. The tactile sensor array shows a remarkable sensitivity of 0.063 V kPa–1 with a linear range from 5 to 50 kPa, which covers a broad range of testing objects. Furthermore, due to the advanced mechanical design, the flexible sensor array exhibits great capability of pressure sensing even under a curved state. The voltage responses from the pattern mapping by finger touching demonstrate the uniformity of the sensor array. Finally, real-time tactile sensing associated with light-emitting diode (LED) array lighting demonstrates the potential application of the sensor array in position tracking, self-powered touch screens, human–machine interfaces and many others.
UR - http://www.scopus.com/inward/record.url?scp=85089182213&partnerID=8YFLogxK
U2 - 10.1038/s41378-020-0154-2
DO - 10.1038/s41378-020-0154-2
M3 - Journal article
AN - SCOPUS:85089182213
SN - 2055-7434
VL - 6
JO - Microsystems and Nanoengineering
JF - Microsystems and Nanoengineering
IS - 1
M1 - 59
ER -
