A metal-electrode-free, fully integrated, soft triboelectric sensor array for self-powered tactile sensing

Lingyun Wang, Yiming Liu, Qing Liu, Yuyan Zhu, Haoyu Wang, Zhaoqian Xie, Xinge Yu (Corresponding Author), Yunlong Zi (Corresponding Author)

Research output: Journal article publicationJournal articleAcademic researchpeer-review

48 Citations (Scopus)


The dramatic advances in flexible/wearable electronics have garnered great attention for touch sensors for practical applications in human health monitoring and human–machine interfaces. Self-powered triboelectric tactile sensors with high sensitivity, reduced crosstalk, and simple processing routes are highly desirable. Herein, we introduce a facile and low-cost fabrication approach for a metal-electrode free, fully integrated, flexible, and self-powered triboelectric tactile sensor array with 8-by-8 sensor units. Through the height difference between the sensor units and interconnect electrodes, the crosstalk derived from the electrodes has been successfully suppressed with no additional shielding layers. The tactile sensor array shows a remarkable sensitivity of 0.063 V kPa–1 with a linear range from 5 to 50 kPa, which covers a broad range of testing objects. Furthermore, due to the advanced mechanical design, the flexible sensor array exhibits great capability of pressure sensing even under a curved state. The voltage responses from the pattern mapping by finger touching demonstrate the uniformity of the sensor array. Finally, real-time tactile sensing associated with light-emitting diode (LED) array lighting demonstrates the potential application of the sensor array in position tracking, self-powered touch screens, human–machine interfaces and many others.

Original languageEnglish
Article number59
JournalMicrosystems and Nanoengineering
Issue number1
Publication statusPublished - 1 Dec 2020

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science (miscellaneous)
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering


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