A MEMS variable optical attenuator (VOA) for DWDM applications

X. M. Zhang, A. Q. Liu, C. Lu, D. Y. Tang, F. Wang, Z. S. Liu, C. Lu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

3 Citations (Scopus)

Abstract

Variable optical attenuators (VOAs) have wide applications in DWDM optical communication systems, for example, equalizing the power levers of different wavelength channels, flattening the gain of optical amplifiers, etc. A MEMS variable optical attenuator with fibers connectorized has been developed using proprietary drawbridge structure, which has achieved 1.5 dB insertion loss, 45 dB dynamic range and 37 ms response time, and requires only 8 V driving voltage. Finite element model and analytical model have also been studied and compared with the experimental data, showing that the two models predict the mechanical characteristics of MEMS VOA with reasonable accuracy.

Original languageEnglish
Pages (from-to)485-495
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4755
DOIs
Publication statusPublished - Apr 2002
Externally publishedYes

Keywords

  • DWDM
  • Fiber-optical communication
  • MEMS
  • Variable Optical Attenuator (VOA)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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