A MEMS tunable metamaterial filter

W. M. Zhu; H. Cai; T. Mei; T. Bourouina; J. F. Tao; G. Q. Lo; D. L. Kwong; A. Q. Liu

doi:10.1109/MEMSYS.2010.5442533

A MEMS tunable metamaterial filter

W. M. Zhu, H. Cai, T. Mei, T. Bourouina, J. F. Tao, G. Q. Lo, D. L. Kwong, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

19 Citations (Scopus)

Abstract

This paper presents a terahertz tunable metamaterial filter using microelectromechanical systems (MEMS) structures. The metamaterial unit cells are tuned by micromachined comb-drive. The metamaterial slab works as a notch filter of THz region, which can lower the transmission of interest frequency down to -70 dB. In the experiment, it measures the tuning range of filter frequency from 3.32 to 3.80 THz. The tunable metamaterial filter has better tunability compared with traditional active metamaterial because the optical property of metamaterial is more sensitive to the change of the unit cell structure.

Original language	English
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	196-199
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442533
Publication status	Published - Jan 2010
Externally published	Yes
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: 24 Jan 2010 → 28 Jan 2010

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	24/01/10 → 28/01/10

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

More information

10.1109/MEMSYS.2010.5442533

Cite this

Zhu, W. M., Cai, H., Mei, T., Bourouina, T., Tao, J. F., Lo, G. Q., Kwong, D. L., & Liu, A. Q. (2010). A MEMS tunable metamaterial filter. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 196-199). Article 5442533 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442533

@inproceedings{3ed753413f1d400ebe250c348adc4619,

title = "A MEMS tunable metamaterial filter",

abstract = "This paper presents a terahertz tunable metamaterial filter using microelectromechanical systems (MEMS) structures. The metamaterial unit cells are tuned by micromachined comb-drive. The metamaterial slab works as a notch filter of THz region, which can lower the transmission of interest frequency down to -70 dB. In the experiment, it measures the tuning range of filter frequency from 3.32 to 3.80 THz. The tunable metamaterial filter has better tunability compared with traditional active metamaterial because the optical property of metamaterial is more sensitive to the change of the unit cell structure.",

author = "Zhu, {W. M.} and H. Cai and T. Mei and T. Bourouina and Tao, {J. F.} and Lo, {G. Q.} and Kwong, {D. L.} and Liu, {A. Q.}",

year = "2010",

month = jan,

doi = "10.1109/MEMSYS.2010.5442533",

language = "English",

isbn = "9781424457649",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "196--199",

booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",

note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

}

Zhu, WM, Cai, H, Mei, T, Bourouina, T, Tao, JF, Lo, GQ, Kwong, DL & Liu, AQ 2010, A MEMS tunable metamaterial filter. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442533, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 196-199, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 24/01/10. https://doi.org/10.1109/MEMSYS.2010.5442533

A MEMS tunable metamaterial filter. / Zhu, W. M.; Cai, H.; Mei, T. et al.
MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 196-199 5442533 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - A MEMS tunable metamaterial filter

AU - Zhu, W. M.

AU - Cai, H.

AU - Mei, T.

AU - Bourouina, T.

AU - Tao, J. F.

AU - Lo, G. Q.

AU - Kwong, D. L.

AU - Liu, A. Q.

PY - 2010/1

Y1 - 2010/1

N2 - This paper presents a terahertz tunable metamaterial filter using microelectromechanical systems (MEMS) structures. The metamaterial unit cells are tuned by micromachined comb-drive. The metamaterial slab works as a notch filter of THz region, which can lower the transmission of interest frequency down to -70 dB. In the experiment, it measures the tuning range of filter frequency from 3.32 to 3.80 THz. The tunable metamaterial filter has better tunability compared with traditional active metamaterial because the optical property of metamaterial is more sensitive to the change of the unit cell structure.

AB - This paper presents a terahertz tunable metamaterial filter using microelectromechanical systems (MEMS) structures. The metamaterial unit cells are tuned by micromachined comb-drive. The metamaterial slab works as a notch filter of THz region, which can lower the transmission of interest frequency down to -70 dB. In the experiment, it measures the tuning range of filter frequency from 3.32 to 3.80 THz. The tunable metamaterial filter has better tunability compared with traditional active metamaterial because the optical property of metamaterial is more sensitive to the change of the unit cell structure.

UR - http://www.scopus.com/inward/record.url?scp=77952753203&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2010.5442533

DO - 10.1109/MEMSYS.2010.5442533

M3 - Conference article published in proceeding or book

AN - SCOPUS:77952753203

SN - 9781424457649

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 196

EP - 199

BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

Y2 - 24 January 2010 through 28 January 2010

ER -

A MEMS tunable metamaterial filter

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