A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

Lie Yi Sheng, Zhenan Tang, Jian Wu, Philip Ching Ho Chan, Johnny K.O. Sin

Research output: Journal article publicationJournal articleAcademic researchpeer-review

64 Citations (Scopus)

Abstract

This paper describes a CMOS compatible integrated gas sensor. The device was designed so that the front-end fabrication is fully compatible with the standard CMOS process. The non-CMOS compatible fabrication steps were carried out as post-processing steps. This included the silicon anisotropic etch to create the thermally isolated micro-hotplate (MHP) and the deposition of gas-sensitive thin films using maskless r.f. SnO2sputtering. The sensors exhibited high sensitivities to gases, such as ethanol and hydrogen.
Original languageEnglish
Pages (from-to)81-87
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume49
Issue number1-2
DOIs
Publication statusPublished - 25 Jun 1998
Externally publishedYes

Keywords

  • Integrated gas sensor
  • Lower power
  • Maskless tin oxide sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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