@inproceedings{e10e3598ceda4ba6ad42fc2a95a77e1a,
title = "A low-loss single-pole-double-throw (SPDT) switch circuit",
abstract = "A low-loss single-pole-double-throw (SPDT) switch circuit using lateral RF MEMS switches has been developed on glass to operate from DC to 20 GHz. High compactness and low loss can be obtained by use of the lateral switches and coplanar waveguide (CPW) configuration. The circuit provides > 24-dB isolation and < 0.9-dB insertion loss up to 20 GHz. The pull-in voltage of the switch is only 12.4 V, with a switching-on time of 35 μs and a switching-off time of 36 μs. A single-mask silicon-on-glass (SiOG) fabrication process has been developed to fabricate the SPDT switch circuit on glass, which has the advantages of low loss and high yield. The whole circuit has a size of 1.64 mm × 1.3 mm.",
keywords = "Low loss, RF MEMS, Silicon-on-glass, SPDT",
author = "M. Tang and Liu, {A. Q.} and A. Agarwal",
year = "2007",
month = jun,
doi = "10.1109/SENSOR.2007.4300221",
language = "English",
isbn = "1424408423",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "IEEE Computer Society",
pages = "679--682",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
address = "United States",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}