TY - GEN
T1 - A hybrid laser integration approach for miniature photonic sensors
AU - Tao, Jifang
AU - Choong, Chong Ser
AU - Sun, Tao
AU - Cai, Hong
AU - Singh, Navab
AU - Gu, Yuandong
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/12
Y1 - 2018/12
N2 - Hybrid laser integration with optical MEMS chips and silicon photonic (SiP) circuits are important for many miniature devices, such as micro-sensor, optical transmitter module. Here, we demonstrated a flexible approach for hybrid integrating laser chip onto silicon device by use of flip-chip bonding method to build a MEMS tunable laser and a miniature silicon optical bench (SiOB) for SiP devices. The maximum coupling efficiency is up to 76.5% and 81.5% for these two devices, respectively. It provides a low cost, miniature, and reliable solution for large-scale deployments Place abstract here: usually a single paragraph summarizing the problem, approach, and results that are in the paper.
AB - Hybrid laser integration with optical MEMS chips and silicon photonic (SiP) circuits are important for many miniature devices, such as micro-sensor, optical transmitter module. Here, we demonstrated a flexible approach for hybrid integrating laser chip onto silicon device by use of flip-chip bonding method to build a MEMS tunable laser and a miniature silicon optical bench (SiOB) for SiP devices. The maximum coupling efficiency is up to 76.5% and 81.5% for these two devices, respectively. It provides a low cost, miniature, and reliable solution for large-scale deployments Place abstract here: usually a single paragraph summarizing the problem, approach, and results that are in the paper.
UR - http://www.scopus.com/inward/record.url?scp=85091704128&partnerID=8YFLogxK
U2 - 10.1109/EPTC.2018.8654448
DO - 10.1109/EPTC.2018.8654448
M3 - Conference article published in proceeding or book
AN - SCOPUS:85091704128
T3 - 2018 IEEE 20th Electronics Packaging Technology Conference, EPTC 2018
SP - 944
EP - 947
BT - 2018 IEEE 20th Electronics Packaging Technology Conference, EPTC 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th IEEE Electronics Packaging Technology Conference, EPTC 2018
Y2 - 4 December 2018 through 7 December 2018
ER -