A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride
- D. K.T. Ng
- , T. Zhang
- , L. Y. Siow
- , L. Xu
- , C. P. Ho
- , H. Cai
- , L. Y.T. Lee
- , Q. Zhang
- , N. Singh
Research output: Journal article publication › Journal article › Academic research › peer-review
35
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(Scopus)