A framework of a model-based simulation system for prediction of surface generation in fast tool servo machining of optical microstructures

Chi Fai Cheung, Wing Bun Lee, Suet To, H. F. Li, S. J. Wang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

6 Citations (Scopus)

Abstract

The fabrication of high-quality optical microstructural surfaces is based on fast tool servo (FTS) machining. It makes use of auxiliary piezo-electric driven servos to rapidly actuate the diamond tool with a fine resolution and a sufficiently high bandwidth for machining optical microstructures with submicrometer form accuracy and a nanometric surface finish without the need for any subsequent post processing. However, the achievement of a superior mirror finish and form accuracy still depends largely on the experience and skills of the machine operators, acquired through an expensive trial-and-error approach to using new materials, new mircostructural surface designs, or new machine tools. As a result, this paper, a model-based simulation system is presented for the optimization of surface quality in the FTS machining of optical microstructures. Preliminary experimental work and the results are also presented.
Original languageEnglish
Pages (from-to)407-411
Number of pages5
JournalKey Engineering Materials
Volume339
DOIs
Publication statusPublished - 20 Mar 2007

Keywords

  • Fast tool servo machining
  • Model-based simulation
  • Optical microstructures
  • Optimization
  • Surface generation

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemical Engineering (miscellaneous)

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