Keyphrases
Residual Stress
100%
Finite Element Simulation
100%
Stress-induced
100%
Lattice Mismatch
100%
Thermal Mismatch
100%
Lattice Dislocations
50%
Room Temperature
25%
Finite Element Method
25%
Film Thickness
25%
Boundary Effect
25%
Interfacial Shear Stress
25%
Finite Element Modeling
25%
Sapphire
25%
Silicon Film Thickness
25%
Intrinsic Stress
25%
Deposition Temperature
25%
Mismatch Effect
25%
Cooling Method
25%
Temperature Stress
25%
Stress Variation
25%
Silicon-on-sapphire
25%
Thin Silicon Layer
25%
Engineering
Finite Element Simulation
100%
Induced Residual Stress
100%
Thin Films
100%
Lattice Mismatch
100%
Temperature Stress
25%
Boundary Effect
25%
Superposition
25%
Deposition Temperature
25%
Intrinsic Stress
25%
Interfacial Shear Stress
25%
Residual Stress
25%
Silicon Layer
25%
Film Silicon
25%
Silicon on Sapphire
25%
Room Temperature
25%
Finite Element Analysis
25%
Fem Model
25%