A novel fiber-tip micro-cavity pressure sensor was fabricated by use of a fusion splicer and a pressurizing gas chamber. The fabrication process is simple and efficient without the need for careful cleaving, chemical etching, and bonding. Micro-cavities with wall thickness of a few micrometers demonstrated a pressure sensitivity of ~315 pm/MPa. The sensors have compact size, good mechanic strength, and high temperature stability up to 600 °C, and may be potentially used for pressure sensing in a high-temperature environment.
- Fiber tip
- high-pressure sensing
- interferometric sensor
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering