A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates

Bin Guo; Amine Bermak; Philip Ching Ho Chan; Gui Zhen Yan

doi:10.1109/ICSENS.2007.355762

A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates

Bin Guo, Amine Bermak, Philip Ching Ho Chan, Gui Zhen Yan

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

3 Citations (Scopus)

Abstract

The paper describes a fabrication process for convex micro-hotplates (MHPs) using surface micro-machining technology. Surface micro-machining provides simplified process and CMOS compatibility over buck Microelectromechanical Systems (MEMS). The low yield of the latter limits the dimension of the fabricated array while limited sacrificial layer thickness in the former leads to higher power consumption. In this work, 700 °C - 950 °C annealing process was carried out on the 190×190 μm2 MHP with 2.8 μm Polysilicon sacrificial layer. Higher temperature leads to lower tensional stress of the membrane and larger curvature of the released MHP, which further causes higher thermal efficiency. The 950 °C annealed MHP has the largest curvature of 2.438 cm-1 and the highest thermal efficiency of 12.76 °C/mW. The proposed process is used to fabricate a 4×4 tin oxide gas sensor array. Experimental result on the response of the sensor array to Ethanol gas is also illustrated in this paper.

Original language	English
Title of host publication	2006 5th IEEE Conference on Sensors
Pages	224-227
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2007.355762
Publication status	Published - 1 Dec 2006
Externally published	Yes
Event	2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of Duration: 22 Oct 2006 → 25 Oct 2006

Conference

Conference	2006 5th IEEE Conference on Sensors
Country/Territory	Korea, Republic of
City	Daegu
Period	22/10/06 → 25/10/06

Keywords

Convex microhotplates
Gas sensor array
Membrane stress
Tin oxide

ASJC Scopus subject areas

Engineering (miscellaneous)
Electrical and Electronic Engineering

More information

10.1109/ICSENS.2007.355762

Cite this

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title = "A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates",

abstract = "The paper describes a fabrication process for convex micro-hotplates (MHPs) using surface micro-machining technology. Surface micro-machining provides simplified process and CMOS compatibility over buck Microelectromechanical Systems (MEMS). The low yield of the latter limits the dimension of the fabricated array while limited sacrificial layer thickness in the former leads to higher power consumption. In this work, 700 °C - 950 °C annealing process was carried out on the 190×190 μm2 MHP with 2.8 μm Polysilicon sacrificial layer. Higher temperature leads to lower tensional stress of the membrane and larger curvature of the released MHP, which further causes higher thermal efficiency. The 950 °C annealed MHP has the largest curvature of 2.438 cm-1 and the highest thermal efficiency of 12.76 °C/mW. The proposed process is used to fabricate a 4×4 tin oxide gas sensor array. Experimental result on the response of the sensor array to Ethanol gas is also illustrated in this paper.",

keywords = "Convex microhotplates, Gas sensor array, Membrane stress, Tin oxide",

author = "Bin Guo and Amine Bermak and Chan, {Philip Ching Ho} and Yan, {Gui Zhen}",

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AU - Guo, Bin

AU - Bermak, Amine

AU - Chan, Philip Ching Ho

AU - Yan, Gui Zhen

PY - 2006/12/1

Y1 - 2006/12/1

N2 - The paper describes a fabrication process for convex micro-hotplates (MHPs) using surface micro-machining technology. Surface micro-machining provides simplified process and CMOS compatibility over buck Microelectromechanical Systems (MEMS). The low yield of the latter limits the dimension of the fabricated array while limited sacrificial layer thickness in the former leads to higher power consumption. In this work, 700 °C - 950 °C annealing process was carried out on the 190×190 μm2 MHP with 2.8 μm Polysilicon sacrificial layer. Higher temperature leads to lower tensional stress of the membrane and larger curvature of the released MHP, which further causes higher thermal efficiency. The 950 °C annealed MHP has the largest curvature of 2.438 cm-1 and the highest thermal efficiency of 12.76 °C/mW. The proposed process is used to fabricate a 4×4 tin oxide gas sensor array. Experimental result on the response of the sensor array to Ethanol gas is also illustrated in this paper.

AB - The paper describes a fabrication process for convex micro-hotplates (MHPs) using surface micro-machining technology. Surface micro-machining provides simplified process and CMOS compatibility over buck Microelectromechanical Systems (MEMS). The low yield of the latter limits the dimension of the fabricated array while limited sacrificial layer thickness in the former leads to higher power consumption. In this work, 700 °C - 950 °C annealing process was carried out on the 190×190 μm2 MHP with 2.8 μm Polysilicon sacrificial layer. Higher temperature leads to lower tensional stress of the membrane and larger curvature of the released MHP, which further causes higher thermal efficiency. The 950 °C annealed MHP has the largest curvature of 2.438 cm-1 and the highest thermal efficiency of 12.76 °C/mW. The proposed process is used to fabricate a 4×4 tin oxide gas sensor array. Experimental result on the response of the sensor array to Ethanol gas is also illustrated in this paper.

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BT - 2006 5th IEEE Conference on Sensors

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ER -

A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates

Abstract

Conference

Keywords

ASJC Scopus subject areas

More information

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