用于抛光的多射流工具及包括该工具的抛光系统

Chunjin Wang (Inventor), Chi Fai Cheung (Inventor), Wing Bun Lee (Inventor), Kam Tong Lai (Inventor), Lai Ting Ho (Inventor)

Research output: Patents, agreements, assignments and companiesPatents granted

Original languageEnglish
Patent numberZL201710013809.1
Publication statusPublished - 25 Jun 2021

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